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Invited) Characterization of Doping and Activation Processes Using Differential Hall Effect Metrology (DHEM)
Invited) Characterization of Doping and Activation Processes Using Differential Hall Effect Metrology (DHEM)
2021
Abhijeet Joshi
Gianluca Rengo
Clement Porret
Kun Lin Lin
Chia-He Chang
Bulent M. Basol
Keywords:
Materials science
Hall effect
characterization
Metrology
Optoelectronics
Doping
differential
Correction
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