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Rapid Thermal Oxidation of Sputtering Power Dependent Vanadium Thin Films for VO2Thin Films Preparation
Rapid Thermal Oxidation of Sputtering Power Dependent Vanadium Thin Films for VO2Thin Films Preparation
2018
Jiran Liang
Yirui Zhao
Jinbang Guo
Zhibin Yang
Tianyu Su
Keywords:
Sputtering
Thin film
Thermal oxidation
Inorganic chemistry
Chemistry
Vanadium
Correction
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