Multilayer structure comprising a precious metal hangs on a dielectric substrate and associated method use
2010
The invention relates to a multilayer structure comprising -a dielectric substrate (1), -a bonding layer (4) extending on a first side of the dielectric substrate (1) -at least one precious metal layer ( 3.31) on said bonding layer (4), said bonding layer (4) comprising a derivative of an alkylsilane compound characterized in that the precious metal layer is established by evaporation or sputtering of said precious metal. The invention also relates to a method of manufacturing such a device is based on an electron beam lithography, optical exposure or nanoimprinting.
Keywords:
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI