Secondary Electron Emission from Multi-layered TiN/Al$_2$O$_3$ Transmission Dynodes

The transmission secondary electron yields of multilayered Al$_2$O$_3$/TiN membranes films have been determined for sub-10-keV primary electrons. These membranes will be used as transmission dynodes in novel vacuum electron multipliers. A bi- and tri-layer variant has been manufactured by means of atomic-layer deposition (ALD) of aluminum oxide and sputtering of titanium nitride. Their transmission electron yield has been measured by a collector-based method operated within a scanning electron microscope. The total transmission and reflection yields have been determined for both types of membranes. The results show that the tri-layer membrane, where the conductive TiN layer is sandwiched, performs better in terms of transmission electron emission. A maximum transmission yield of 3.1 is obtained for a 5/2.5/5 nm thick Al$_2$O$_3$/TiN/Al$_2$O$_3$ film with 1.55 keV-electrons. In addition, the transmission characteristics of the bi-layer membranes have been further investigated by separating the transmitted fraction and the transmission secondary electron yield. The latter is then normalized by its maximum yield and energy to obtain a 'universal' transmission yield curve. For thin films with a thickness below 20 $\mu$g/cm$^2$, the transmission characteristics deviates from thicker films, which can explain the higher transmission secondary electron yield observed.