Effect of Ag nanoparticles integrated within antireflection coatings for solar cells

The influence of the relative position of Ag metallic nanoparticles (Ag MNPs) embedded in a 100 nm SiOx Antireflection Coating (ARC) for specular polished c-Si substrates is studied. It is demonstrated that this Plasmonic ARC (PARC) can achieve lower average reflectivities than the optimised SiOx ARC. This has been done for different sizes of Ag nanoparticles. An alternative for PECVD to encapsulate Ag MNPs with SiOx is presented, avoiding the risk of metallic contamination in the reactor chamber as well as its effect on the size and shape of the self-aggregated Ag MNP. It is demonstrated, however, that this PARC is not suitable for silicon solar cells as a substitute for traditional ARC because it presents a high loss related with Fano destructive interference.