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Influence of plasma interaction on clusters formation in silicon
Influence of plasma interaction on clusters formation in silicon
1977
A. Grigonis
A. Batulevicius
S. Bruzas
L. Pranevicius
Keywords:
Semimetal
Chemical physics
Infrared spectroscopy
Ion
Plasma
Crystal structure
Crystallographic defect
Sputtering
Materials science
Silicon
Correction
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