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Reliability issues in high-k stacks
Reliability issues in high-k stacks
2004
Robin Degraeve
Felice Crupi
M. Houssa
Dong Hwa Kwak
A. Kerber
E. Cartier
Thomas Kauerauf
Ph. Roussel
J.L. Autran
Geoffrey Pourtois
L. Pantisano
S. De Gendt
M. Heyns
G. Groeseneken
Keywords:
High-κ dielectric
Electronic engineering
Stack (abstract data type)
Materials science
Engineering physics
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