Highly periodic Au nano-disc arrays for plasmon-resonant SERS structures on fused silica using UV-NIL based double-layer lift-off process

Au nanostructures of different types are widely employed as substrates for surface-enhanced Raman spectroscopy (SERS) due to their strong plasmon-related near-field enhancement in the visible and NIR frequency range as well as their potential for biologically active interfaces. We report on a fabrication route for highly periodic Au nano-discs by combination of laser interference lithography (LIL) with nanoimprint lithography (NIL) using a double-layer lift-off process to produce extremely homogenous periodic arrays over areas of 6 wafer scale with sufficiently sharp plasmonic resonance. FDTD simulations were done to yield specifically designed plasmonic activity at a wavelength of 785nm commonly used in Raman spectrometers. Optical characterisation of the resulting samples was compared to simulation predictions and linked to SERS signal intensity and reproducibility. Display Omitted