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(Invited) Engineering high-k/InGaAs Interface for Extremely Scaled Gate Stacks
(Invited) Engineering high-k/InGaAs Interface for Extremely Scaled Gate Stacks
2015
D.H. Zadeh
H. Oomine
K. Kakushima
H. Iwai
Keywords:
High-κ dielectric
Electronic engineering
Stack (abstract data type)
Materials science
gate stack
Optoelectronics
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