Graphite foil as the supporting membrane of LIGA masks

A. N. Gentselev,S. K. Golubtsov,B. G. Gol’denberg,V. I. Kondrat’ev,V. F. Pindyurin,A. G. Zelinskii

Graphite foil as the supporting membrane of LIGA masks

2011

A. N. Gentselev
S. K. Golubtsov
B. G. Gol’denberg
V. I. Kondrat’ev
V. F. Pindyurin
A. G. Zelinskii

The first results of using manufactured available graphite foil as a material for supporting membranes in X-ray LIGA masks are presented, and a comparison of them with analogues is carried out.

Keywords:

Nanotechnology
Analytical chemistry
LIGA
FOIL method
Graphite
Membrane
Composite material
Chemistry
Thin film

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