Disorder creation and annealing in Hg implanted CdTe

Abstract Mercury has been implanted in CdTe single crystals at room temperature and the damaging process studied by Rutherford backscattering (RBS) of He particles in channeling conditions for increasing fluences. Although the energy deposited in nuclear collisions is large due to the heavy mass of the implanted ion, the disordering mechanism is similar to the one observed during light ion implantation. Hence, disordering is mainly governed by CdTe characteristics rather than by nuclear collision parameters. The furnace annealing behavior at different temperatures has been followed. For T = 400° C during 2 hours a total damage recovery as characterized by RBS is reached.