Laser thermoreflectance for semiconductor thin films metrology
2012
We present a thermoreflectance-based metrology concept applied to compound semiconductor thin films off-line
characterization in the solar cells scribing process. The presented thermoreflectance setup has been used to evaluate the
thermal diffusivity of thin CdTe films and to measure eventual changes in the thermal properties of 5 μm CdTe films
ablated by nano and picosecond laser pulses. The temperature response of the CdTe thin film to the nanosecond heating
pulse has been numerically investigated using the finite-difference time-domain (FDTD) method. The computational and
experimental results have been compared.
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