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Investigation of diffusional intermixing in Si/Co/Ta system by Secondary Neutral Mass Spectrometry
Investigation of diffusional intermixing in Si/Co/Ta system by Secondary Neutral Mass Spectrometry
2012
Ákos Lakatos
G. Erdélyi
Alajos Makovec
Gábor A. Langer
Dezső L. Beke
Attila Csik
Kálmán Vad
Keywords:
Semimetal
Atmospheric temperature range
Cobalt
Transition metal
Analytical chemistry
Mass spectrometry
Refractory metals
Materials science
Tantalum
Silicon
Correction
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