Old Web
English
Sign In
Acemap
>
Paper
>
Materials characterization of WN x C y , WN x and WC x films for advanced barriers
Materials characterization of WN x C y , WN x and WC x films for advanced barriers
2007
Henny Volders
Zs. Tokei
Hugo Bender
Bert Brijs
Rudy Caluwaerts
L. Carbonell
Thierry Conard
Christel Drijbooms
Alexis Franquet
S. Garaud
I. Hoflijk
Abdallah Moussa
Fabrice Sinapi
Youssef Travaly
Danielle Vanhaeren
G. Vereecke
Cangsang Zhao
Wei Li
Hessel Sprey
Alain M. Jonas
Keywords:
Analytical chemistry
Nanotechnology
Materials science
Molecular physics
Correction
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]