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Fabrication of large-scale X-ray multilayers by DECR plasma sputtering
Fabrication of large-scale X-ray multilayers by DECR plasma sputtering
1996
M. Lingham
E. Ziegler
E. Lueken
J.C. Peffen
Keywords:
surface coating
Auger electron spectroscopy
Tantalum
Fabrication
Plasma
Thin film
Sputtering
Materials science
Optoelectronics
Silicon
Correction
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