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In-situ process integration of polysilicon emitter stacks by Rapid Thermal Multi-Processing
In-situ process integration of polysilicon emitter stacks by Rapid Thermal Multi-Processing
1992
J.G.E. Klappe
I. Bársony
R. Remmers
Hans Wallinga
Keywords:
Thermal
Polysilicon depletion effect
Common emitter
Electronic engineering
Process integration
In situ
Materials science
Optoelectronics
Multiprocessing
Stack (abstract data type)
Correction
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