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Cathodic arc deposition of diamond-like carbon : effect of bias voltage and deposition angle
Cathodic arc deposition of diamond-like carbon : effect of bias voltage and deposition angle
1991
B. Rother
J. Siegel
I. Mühling
H. Fritzsch
K. Breuer
Keywords:
Biasing
Diamond-like carbon
Cathodic arc deposition
Materials science
Metallurgy
Correction
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