Electro-optical characteristics of indium tin oxide (ITO) films: effect of thermal annealing

The effect of thermal annealing on the electrical and optical characteristics of ITO films prepared by reactive sputtering and thermal evaporation have been studied. The effect of the thermal annealing is to improve the conductivity and the optical transmission in the shorter wavelength region. The conductivity of the films increases with annealing temperature, this behaviour is associated with grain growth in the film.