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Influence of the sputtering variables in the ion bombardment during off-axis deposition of YBa[sub 2]Cu[sub 3]O[sub x] films
Influence of the sputtering variables in the ion bombardment during off-axis deposition of YBa[sub 2]Cu[sub 3]O[sub x] films
1999
M. Acosta
O. Arés
Victor Sosa
Carlos E. Acosta
Joaquín Peña
Keywords:
Sputtering
Inorganic chemistry
Ion
Chemistry
Correction
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