High reliability of nanometer-range N/sub 2/O-nitrided oxides due to suppressing hole injection
1996
Hole transport and trapping in N/sub 2/O-nitrided oxides have been studied. It is shown that N/sub 2/O-nitridation of oxides suppresses hole injection into the oxides. The suppression of hole injection is a mechanism leading to the enhancement of reliability of the nitrided oxides under channel hot-hole and F-N stresses.
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