The Growth Of High-Quality MCT Films by MBE Using in Situ Ellipsometry

The ellipsometry and RHEED study of MCT grown on (112) CdTe and GaAs by MBE was carried out. The dependence of ellipsometric parameter on composition is evaluated. As shown we can measure the growth rate, the roughness changing, initial temperature and composition by ellipsometry in situ . We investigated the evolution of roughness of film surface. We observed the appearance of surface roughness at initial stage of MCT growth under various composition (X cdTe 0÷0.4). The following growth in optimal growth condition (including constancy of substrate temperature) gives us the smoothing of the surface and supplies us the high-quality MCT films. It is found that under constant temperature of substrate heater we can not grow the thick, perfect film of MCT. The concentration, mobility and life time of carriers in MCT films were respectively: n=1.8*10 14 ÷8.2*10 15 cm −3 , μ n =44000÷370000cm 2 V −1 s −1 , τ=40÷220ns;p=1.8*10 15 ÷8.4*10 15 cm −3 , μp=215÷284 cm 2 V −1 s −1 τ=12÷20ns.