The oxygen effect on CdS/CdTe solar cell activated with CHClF 2

The solar cells were fabricated using layers ITO/ZnO/CdS/CdTe. Films of ZnO and CdS were deposited by rf-sputtering. The CdTe film was grown by the conventional technique of closed space sublimation (CSS). The cells were activated by using the following gases: argon, CHClF 2 -argon and CHClF 2 -argon-oxygen. The last gas improves the J SC and V OC . Cu (15 nm) and Mo (500 nm) used as back contact were deposited by rf-sputtering.