Analysis and Optimization of Stability of CAS-LIBB Single Ion Microbeam

Single ion microbeam is the most advanced technology which can emit a single ion for precise localization. A single-ion microbeam facility has been constructed at the Key Laboratory of Ion Beam Bioengineering (LIBB), Chinese Academy of Sciences (CAS), with a spatial resolutions of about 5 μm. Based on CAS-LIBB microbeam, three key elements affecting the quality of the system are assessed: the size of beam spot, the energy range and the counting accuracy of implanting ions. Various contributions to the ion beam stability, including the ion source, the terminal voltage of electrostatic accelerator and the components in beam pipeline, are discussed. Analysis shows that the improvement of terminal voltage stability is the most important issue for future optimization of CAS-LIBB facility. Some preliminary investigations and project aimed at optimization and development are proposed as well.