Developments in abatement technology for MOCVD processing

Abstract A newly developed technical solution has been developed for hydride gas abatement that utilizes a new material. The ULTIMA-Sorb™ material provides high capacity but low heat of reaction with the hydride gases. The new technology results in a low cost of ownership (COO) with stable operation and also reduces the cost and quantity of waste disposal. This can be significant benefit for device manufacturers since it provides a viable and cost effective solution without any risk of arsenic leakage that is a primary concern with wet chemical scrubber systems. The contents of this paper will discuss the technical and economic benefits of the newly developed material in comparison to conventional abatement materials and systems. The capacity of the dry abatement materials significantly influences both COO relating to cash outflow and the cost of lost production. High capacity materials enable significant savings in cost of lost production in cases of low and high factory utilization conditions. Capacity of the abatement material appears to be the largest single factor to reduce COO of dry abatement systems.