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Magnetic Properties of Co-Cr Films Prepared by Sputtering Using Electron Cyclotron Resonance Microwave Plasma.
Magnetic Properties of Co-Cr Films Prepared by Sputtering Using Electron Cyclotron Resonance Microwave Plasma.
1996
K. Sato
Setsuo Yamamoto
H. Kurisu
M. Matsuura
Keywords:
Nuclear magnetic resonance
Ion cyclotron resonance
Physics
Sputtering
Electron cyclotron resonance
Ion source
ion energy
recording media
Correction
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