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Growth of GaN single-crystalline by UHV sputter epitaxy method
Growth of GaN single-crystalline by UHV sputter epitaxy method
2017
Wataru Watanabe
Tsubasa Yoshimura
Reo Suzuki
A-i Mizuno
Ki Ando
Hiroyuki Shinoda
Nobuki Mutsukura
Keywords:
Epitaxy
Sputtering
Optoelectronics
Crystal
Materials science
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