On-product focus monitoring and control for immersion lithography in 3D-NAND manufacturing

The market transition from 2D to 3D-NAND in recent years requires strict focus control and monitoring solutions. ASML’s μDBF targets (micro Diffraction Based Focus) enable on-product focus measurement which can be used to optimize scanner correction. Additionally, dense computational focus maps can be generated by combining μDBF measurements with scanner metrology such as non-correctable leveling error. This paper discusses the focus variability observed on memory layers through on product focus monitoring. This work will show how exposure at best focus can be performed for immersion lithography in the case of strong focus fingerprints. Focus monitoring data from μDBF and computational focus metrology will be used to generate and apply corrections on two 3D-NAND layers.