units manufacturing process within a layer of polymer

2007 
polymer sites are formed on a support (2). These sites are subjected to plasma deposition of dielectric material (3) and preferentially react with said plasma so as to form openings (6) at said sites. A network of patterns is then formed in the dielectric material (3) and / or in the polymer (4).
    • Correction
    • Source
    • Cite
    • Save
    • Machine Reading By IdeaReader
    0
    References
    0
    Citations
    NaN
    KQI
    []