Three dimensional whispering gallery mode resonators and microlasers made by a combination of direct laser writing and soft nanoimprint lithography

Microresonators and lasers on the micro- and nanoscale are potential candidates for spectroscopic applications and sensing elements. The optical properties of these devices enable highly sensitive elements in biophotonics. They can be integrated in lab-on-chip platforms and act as biosensors for label-free detection of molecules in point-of-care diagnosis. One of the most promising resonators type is the whispering gallery mode resonator due to the high quality factors that have been shown to even enable single molecule detection [1].