Modeling and fabrication of three-dimensional silicon substrates with tailored shape and microtopography parameters for CdTe films

Seven models were constructed for the surface of three-dimensional silicon substrates. We proposed models of upright and inverted pyramids (and frusta) and models of substrates with triangular and prismatic cross sections. In modeling, we took into account the capabilities of photolithography and anisotropic etching of silicon wafers. We modeled the light ray trajectory in a thin-film three-dimensional CdS/CdTe solar cell with a large surface area. Three-dimensional microtextured substrates were fabricated using photomasks and modeling and calculation results. Their surface morphology was studied by scanning electron microscopy. The elemental composition of the microtextured silicon substrates was determined.