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Mass Spectroscopy during Inhibitor Film Desorption from a cryogenic etching process
Mass Spectroscopy during Inhibitor Film Desorption from a cryogenic etching process
2004
Remi Dussart
Lawrence Overzet
X. Mellhaoui
Thomas Chaillou
Antoine Prouet
Thomas Tillocher
Philippe Lefaucheux
Pierre Ranson
Keywords:
Desorption
Etching
Materials science
Mass spectrometry
Analytical chemistry
Correction
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