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Resonant type pressure sensor

2015 
The invention provides a resonant type pressure sensor. The sensor comprises a sensor body, a pressure-sensitive film is formed at the bottom of the sensor body, a first resonator and a second resonator are formed on the pressure-sensitive film, the two resonators have the same intrinsic frequency, sensitivities, to the pressure P acting on the pressure-sensitive film, of the two resonators are equal, the first resonator is located in the center of the pressure-sensitive film, and the second resonator is located on the edge of the pressure-sensitive film. According to the resonant type pressure sensor, the two resonators are adopted, pressure characteristics of the sensor are represented by means of differential frequency output, influences of temperature factors are reduced, and pressure sensitivity and linearity of the sensor are improved. Temperature characteristics of the sensor are represented by means of sum frequency output for sensor temperature compensation, and the use temperature range of the sensor is widened.
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