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Fabrication of Si-containing calcium phosphate thin film by Sputtering method and adhesion to the cells
Fabrication of Si-containing calcium phosphate thin film by Sputtering method and adhesion to the cells
2019
Shuji Kameda
Yasuhiro Koshio
Kazuaki Nagayama
Kazuhide Ozeki
Keywords:
Calcium
Thin film
Adhesion
Fabrication
Sputtering
Chemical engineering
Materials science
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