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Improvement in Sputtering Rate Uniformity over Large Deposition Area of Large-Scale Ion Beam Sputtering System
Improvement in Sputtering Rate Uniformity over Large Deposition Area of Large-Scale Ion Beam Sputtering System
2021
Ryuji Maruyama
Dai Yamazaki
Kazuhiro Akutsu-Suyama
Takayasu Hanashima
Noboru Miyata
Hiroyuki Aoki
Kazuhiko Soyama
Keywords:
Sputtering
Optoelectronics
scale
Deposition (chemistry)
ion beam sputtering
Materials science
Correction
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