Properties of sputter and Sol-Gel deposited PZT thin films for sensor and actuator applications: Preparation, stress and space charge distribution, self poling

Abstract In this paper, properties of sputter– and sol–gel deposited PZT thin films are reviewed and compared. It is shown that film properties are influenced by type and parameter of fabrication technology. By means of determining both stress and space charge distribution in the PZT films, it can be seen that an oxygen vacancy leads to a strong self–polarization which is stable under sensor operation conditions and makes these films very advantageous for pyroelectric IR sensors.