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Preparation of Silicon Nitride Film by Sputtering Method (II)
Preparation of Silicon Nitride Film by Sputtering Method (II)
1992
Naonobu Shimamoto
Yuko Hirohata
Masao Hashiba
Tomoaki Hino
Toshiro Yamashina
Katsumasa Yabe
Keywords:
Silicon nitride
Sputtering
Nitride
Analytical chemistry
Inorganic chemistry
Chemistry
Optoelectronics
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