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The effect of negative oxygen ions on the growth of sputter deposited ceria thin films
The effect of negative oxygen ions on the growth of sputter deposited ceria thin films
2014
Sigelinde Van Steenberge
Wouter Leroy
Diederik Depla
Keywords:
Thin film
Oxygen
Sputtering
Inorganic chemistry
Ion
Materials science
oxygen ions
Correction
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