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Mechanical Properties of Low Refractive Index SiO 2 Optical Thin Films by Sputtering and Electron Beam Evaporation
Mechanical Properties of Low Refractive Index SiO 2 Optical Thin Films by Sputtering and Electron Beam Evaporation
2021
Hiroyasu Kato
Shigeharu Matumoto
Hiroshi Murotani
Keywords:
Refractive index
Thin film
Optoelectronics
Materials science
Sputtering
optical thin film
Electron beam physical vapor deposition
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