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BCl 3 plasma treatment effect on ohmic contact resistance in GaN-based high electron mobility transistors
BCl 3 plasma treatment effect on ohmic contact resistance in GaN-based high electron mobility transistors
2014
Anton Kobelev
Alexander S. Smirnov
Yuri V. Barsukov
Nikolay Andrianov
Keywords:
Electron mobility
Plasma
Transistor
Ohmic contact
Analytical chemistry
Materials science
high electron
plasma treatment
Optoelectronics
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