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Yuri V. Barsukov
Yuri V. Barsukov
Dry etching
Materials science
Inorganic chemistry
Analytical chemistry
Boron trichloride
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6
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Enhanced silicon nitride etching in the presence of F atoms: Quantum chemistry simulation
2018
Journal of Vacuum Science and Technology
Yuri V. Barsukov
Vladimir Volynets
Anton Kobelev
Nikolai A. Andrianov
Alexander V. Tulub
Alexander S. Smirnov
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Citations (6)
Boron Trichloride Dry Etching
2016
Anton Kobelev
Nikolay Andrianov
Yuri V. Barsukov
Alexander S. Smirnov
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