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The Argon Dilution Effects on Optical Emission Spectra of Fluorocarbon Ultrahigh-Frequency Plasmas
The Argon Dilution Effects on Optical Emission Spectra of Fluorocarbon Ultrahigh-Frequency Plasmas
1998
T. Nakano
S. Samukawa
Keywords:
Spectral line
Fluorocarbon
Materials science
Argon
optical emission spectroscopy
Analytical chemistry
Plasma
ultrahigh frequency
Dilution
Correction
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