New Piezoelectric Bimorph Structure Actuators with High Performances

Abstract We have developed three types of piezoelectric bimorph structure actuators. The first actuator has a displacement of over 3 mm at 100 Vpk and high reliability by resonance effect of the displacement magnifying part. The second one has a displacement of over 1 mm at 100 Vpk and high stability for change in driving frequency by combined two resonances. The third one has a linearity of displacement until 85% of fracture point and low temperature characteristics by a direct bonding technique that bonds piezoelectric single crystals without using adhesive.