大面積 Catalytic Chemical Vapor Deposition 装置の開発
2004
Keywords:
- Analytical chemistry
- Hybrid physical-chemical vapor deposition
- Chemical vapor deposition
- Catalysis
- Plasma processing
- Combustion chemical vapor deposition
- Plasma-enhanced chemical vapor deposition
- Deposition (phase transition)
- Chemistry
- Inorganic chemistry
- catalytic chemical vapor deposition
- Chemical engineering
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