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Round-Robin Study of Implants in Si and SiO2 by SIMS, RBS, and NAA
Round-Robin Study of Implants in Si and SiO2 by SIMS, RBS, and NAA
1990
Peter Roitman
David S. Simons
P. H. Chi
Richard M. Lindstrom
G. E. Lux
S Baumann
Steven W. Novak
R. G. Wilson
D Farrington
J. Keenan
F.A. Stevie
J. L. Moore
R. B. Irwin
A. J. Filo
Charles W. Magee
R Alcorn
D. File
Keywords:
Materials science
Metallurgy
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