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Increased Strain Relaxation in AlGaN Layers Grown on Sputter-based AlN Templates
Increased Strain Relaxation in AlGaN Layers Grown on Sputter-based AlN Templates
2019
Yosuke Mogami
Atsushi Osawa
Kazuto Ozaki
Yukitake Tanioka
Atsushi Maeoka
Yuri Itokazu
Shunsuke Kuwaba
Jo Masafumi
Noritoshi Maeda
Hiroyuki Yaguchi
Hideki Hirayama
Keywords:
Annealing (metallurgy)
Sputtering
Strain (chemistry)
Template
Composite material
Materials science
Correction
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