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Thin films of thermoelectric compound Mg2Sn deposited by co-sputtering using ECR microwave multi-dipolar plasma
Thin films of thermoelectric compound Mg2Sn deposited by co-sputtering using ECR microwave multi-dipolar plasma
2011
H. Le-Quoc
Ana Lacoste
E.K. Hlil
A. Bès
Jacques Pelletier
D. Fruchart
Keywords:
Dipole
Nuclear magnetic resonance
Thin film
Sputtering
Thermoelectric effect
Plasma
Materials science
Microwave
Optoelectronics
Correction
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