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Full-Metal-Gate Integration of Dual-Metal-Gate HfSiON CMOS Transistors by Using Oxidation-Free Dummy-Mask Process
Full-Metal-Gate Integration of Dual-Metal-Gate HfSiON CMOS Transistors by Using Oxidation-Free Dummy-Mask Process
2006
Fumio Ootsuka
Yasuyuki Tamura
Yasushi Akasaka
Seiji Inumiya
Hiroyuki Nakata
M. Ohtsuka
Takanobu Watanabe
Masami Kitajima
Yasuo Nara
Kunio Nakamura
Keywords:
Metal gate
Electronic engineering
Transistor
CMOS
Materials science
Optoelectronics
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