A reliability study of a miniature thermoelectric generator

An accelerated life testing reliability programme for miniature thermoelectric generators, fabricated using MOS processing technology, is described. From this, it is shown that the mean time to failure of a device is 5*104 h at the extreme of its normal operating range, i.e. 200 degrees C. The results of the programme also provide an insight into the failure mechanisms associated with miniature thermoelectric devices and enable the dominant mode to be detected. Consequently, the sections of the process sequence which would benefit from modification are identified.