Effect of decomposition and organic residues on resistivity of copper films fabricated via low-temperature sintering of complex particle mixed dispersions

Yingqiong Yong,Mai Thanh Nguyen,Hiroki Tsukamoto,Masaki Matsubara,Ying-Chih Liao,Tetsu Yonezawa

Effect of decomposition and organic residues on resistivity of copper films fabricated via low-temperature sintering of complex particle mixed dispersions

2017

Yingqiong Yong
Mai Thanh Nguyen
Hiroki Tsukamoto
Masaki Matsubara
Ying-Chih Liao
Tetsu Yonezawa

Effect of decomposition and organic residues on resistivity of copper films fabricated via low-temperature sintering of complex particle mixed dispersions

Keywords:

Dispersion (chemistry)
Particle
Copper
Electrical resistivity and conductivity
Sintering
Inorganic chemistry
Materials science
Decomposition
Chemical engineering

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