Record-High-Performance Hydrogenated In-Ga-Zn-O Flexible Schottky Diodes.
2020
High-performance In–Ga–Zn–O (IGZO) Schottky diodes (SDs) were fabricated using hydrogenated IGZO (IGZO:H) at a maximum process temperature of 150 °C. IGZO:H was prepared by Ar + O2 + H2 sputtering....
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